Release:
2022. Vol. 8. № 4 (32)About the authors:
Boris S. Yezdin, Cand. Sci. (Phys.-Math.), Associate Professor, Novosibirsk State University; bse@nsu.ruAbstract:
In this work the pyrolysis of monosilane under adiabatic compression conditions in an argon atmosphere is investigated. Cyclic compression reactor is used to create thermodynamic conditions required for monosilane pyrolysis. It is shown that for the monosilane content in the buffer gas not exceeding 20% the complete pyrolysis occurs in the peak pressure range above 2.5 MPa. The monosilane decomposition into silicon and hydrogen is accompanied by the synthesis of silicon nanoparticles sized 10-150 nm. The maximum size of the particles occurs at 50-60 nm. The particle sizes follow the lognormal distribution which points in favour of the growth mechanism due to the fusion of smaller particles.References: