Modeling of high-current low-pressure discharge in planar and cylindrical magnetrons

About the author:

Sergey Yu. Udovichenko, Dr. Sci. (Phys.-Math.), Professor of Department of Applied and Technical Physics; Head of REC “Nanotechnology”, University of Tyumen; eLibrary AuthorID, ResearcherID, ScopusID, udotgu@mail.ru

Abstract:

A hydrodynamic model of high-current form of glow discharge of low pressure in a planar magnetron is developed. A model of this discharge in cylindrical and inverted cylindrical magnetrons is also presented. The models take into account the generation of fast electrons due to γ–processes at the cathode under the action of incident plasma ions. The conditions of self-sustaining discharge are revealed, which allows to evaluate the burning voltage of discharge, to determine the critical value of the magnetic field and the residual gas pressure below which the existence of high-current form of discharge becomes impossible. The conditions of self-sustaining discharge in magnetrons of different geometry were compared.

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